Top down IC failure analysis using an E-beam system coupled to a functional teste

Raoul Velazco (1) , D. Conard (1) , A. Guyot (1) , H. Ziade (2)

1 TIMA - Techniques de l'Informatique et de la Microélectronique pour l'Architecture des systèmes intégrés
2 FACULTY OF ENGINEERING I - Faculty of Engineering I

A diagnosis system devoted to precise failure analysis of complex ICs has been built up by coupling an E-beam tester, a functional tester and a test program generator. A case study illustrates the approach efficiency and the tools flexibility.

Mots clés: top-down-IC-failure-analysis; electron-beam-tester; functional-tester; diagnosis-system; test-program-generator

Domaines: Micro et nanotechnologies/Microélectronique

Raoul Velazco, D. Conard, A. Guyot, H. Ziade. Top down IC failure analysis using an E-beam system coupled to a functional teste. Microelectronic Engineering, 1990, May 1990; 12(1-4), pp.113-120. ⟨10.1016/0167-9317(90)90022-L⟩. ⟨hal-00008272⟩