2018

auteur

Edouard Laudrel, Thomas Tillocher, Yannick Meric, Philippe Lefaucheux, Bertrand Boutaud, Rémi Dussart

titre

The effect of SF 6 addition in a Cl 2 /Ar inductively coupled plasma for deep titanium etching

article

Journal of Micromechanics and Microengineering, 2018, 28 (5), ⟨10.1088/1361-6439/aaafe7⟩

DOI

DOI : 10.1088/1361-6439/aaafe7

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