2019

auteur

Fadi Zoubian, Hervé Rabat, Olivier Aubry, Nicolas Dumuis, Sébastien Dozias, David Munoz-Rojas, Dunpin Hong

titre

Development and characterization of an atmospheric pressure plasma reactor compatible with spatial ALD

article

Journal of Physics: Conference Series, 2019, 15th High-Tech Plasma Processes Conference (HTPP15) 2–6 July 2018, Toulouse, France, 1243, pp.012002. ⟨10.1088/1742-6596/1243/1/012002⟩

DOI

DOI : 10.1088/1742-6596/1243/1/012002

Accès au texte intégral et bibtex