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Article Dans Une Revue Semiconductor Science and Technology Année : 2012

Thermal annealing of molecular beam epitaxy-grown InGaN/GaN single quantum well

Résumé

The effect of thermal annealing on In0.25Ga0.75N/GaN quantum wells grown by molecular beam epitaxy at 550°C is investigated. A strong increase in the 300 K photoluminescence (PL) intensity is observed for samples annealed at 880°C, while degradation occurs for higher temperatures. The improvement of the optical properties is ascribed to higher internal quantum efficiency (IQE), as indicated by temperature-dependent and time-resolved PL experiments. The effect of carrier localization due to possible quantum dot formation via indium clustering is ruled out based on high-resolution transmission electron microscopy imaging. IQE improvement is thus attributed to a reduction of point defects upon annealing.

Dates et versions

hal-00805853 , version 1 (29-03-2013)

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Nils Kaufmann, Amélie Dussaigne, Denis Martin, Pierre Valvin, Thierry Guillet, et al.. Thermal annealing of molecular beam epitaxy-grown InGaN/GaN single quantum well. Semiconductor Science and Technology, 2012, 27 (10), pp.105023. ⟨10.1088/0268-1242/27/10/105023⟩. ⟨hal-00805853⟩
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