Plasma-based ion implantation : a valuable technology for the elaboration of innovative materials and nano-structured thin films - ICPP 2004 Accéder directement au contenu
Communication Dans Un Congrès Année : 2004

Plasma-based ion implantation : a valuable technology for the elaboration of innovative materials and nano-structured thin films

Résumé

Plasma-based ion implantation (PBII), invented in 1987, can now be considered as a mature technology for thin film modification. After a short recall of the principle and physics of PBII, its advantages and disadvantages, as compared to conventional ion beam implantation, are listed and commented. The elaboration of thin films or the modification of their functional properties by PBII are now currently achieved in many application fields, such as microelectronics (plasma doping / PLAD), biomaterials (surgical implants, bio- and blood-compatible materials), plastics (grafting, surface adhesion), metallurgy (hard coatings, tribology), to name a few. The major interest of PBII processing lies, on one hand, in its flexibility in terms of ion implantation energy (from zero to 100 keV), of operating conditions (plasma density, collisional or non-collisional ion sheath), and, on the other hand, in the possibility to easily transfer processes from the laboratory to industry. The possibility to modify the composition and the physical nature of the films, or to change drastically their physical properties over several orders of magnitude makes this technology very attractive for the elaboration of innovative materials, including metastable materials, and the realization of micro- or nanostructures. A review of the state-of-the-art in these domains is presented and illustrated through a few selected examples The perspectives opened by PBII processing, as well as its limitations, are discussed.
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Dates et versions

hal-00002030 , version 1 (23-11-2004)

Identifiants

  • HAL Id : hal-00002030 , version 1

Citer

D. Vempaire, J. Pelletier, A. Lacoste, Stéphane Béchu, J. Sirou, et al.. Plasma-based ion implantation : a valuable technology for the elaboration of innovative materials and nano-structured thin films. 12th International Congress on Plasma Physics, Oct 2004, Nice, France. ⟨hal-00002030⟩

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